제조사 | LIMO |
---|---|
가격 | TBD |
문의 | 02-3461-1103 |
Top hat, rectangular, square and lines – the LIMO homogenizers can produce many different beam shapes making it extremely versatile in use. LIMO beam shaping solutions are already being used successfully in production as substrates and as complete modules.
In addition to standard homogenizer substrates, LIMO also offers customized solutions. Our production technology enables us to produce customized freeform surfaces with highest precision on different wafer sizes (up to 300 mm).
Benefits:
Our standard homogenizer substrates are used individually or as pairs for uniform laser illumination. LIMO's precision homogenizers are used in the exposure units (steppers and scanners) in microlithography.
Further application examples:
Effective focal length [mm] (PDF) | Pitch [mm] | Size [mm²] | webshop |
---|---|---|---|
4.23 - 61.6 | 0.5 | 12x12 | ZLA000481 |
8.55 - 206.5 | 0.8 | 20x20 | |
5.88 - 98.3 | 1.3 | 35x35 |
In addition to customized homogenizer substrates, LIMO also offers onesided structured microlens arrays. More information on that can be found here.
We offer customized homogenizer modules as well as complete beam shaping systems including scanner - according to your requirements.
Homogenizer module (beam shaper 180 x 180 mm²) for off-axis illumination
Example: Photoluminescence measurement with LIMO homogenizer modules